Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures

論文

著者

Jangyup Son ; Junyoung Kwon ; SunPhil Kim ; Yinchuan Lv ; Jaehyung Yu ; Jong-Young Lee ; Huije Ryu ; Kenji Watanabe ; Takashi Taniguchi ; Rita Garrido-Menacho ; Nadya Mason ; Elif Ertekin ; Pinshane Y. Huang ; Gwan-Hyoung Lee ; Arend van der Zande

キーワード

Atomically precise fabrication, graphene etch stop, nanoelectronics

刊行年月日

2018-09-28

更新時刻

2025-02-23 22:50:05 +0900