[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K

Magazine

Collection

Research Highlights

Creator

International Center for Materials Nanoarchitectonics (WPI-MANA)

Keyword

GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain

Date published

2021-07-13

Updated at

2023-12-26 21:38:08 +0900