Effects of Plasma Reactants on Atomic Layer Deposition of Lithium Phosphate and Lithium Phosphorus Oxynitride Electrolyte Films

Article

Creator

Tohru Tsuruoka ; Samapika Mallik ; Takuji Tsujita ; Yuu Inatomi ; Kazuya Terabe

Keyword

atomic layer deposition, lithium phosphate, lithium phosphorus oxynitride, solid-state electrolyte, plasma reactant

Date published

2024-06-25

Updated at

2025-06-25 08:30:22 +0900