Ultrathin specimen preparation by a low energy Ar ion milling method

Article

Creator

Masanori Mitome

Keyword

Ar-ion milling, sample preparation, ultrathin specimen, low-energy ion beam, gamma-Ga2O3, (Zn, Cr) Te

Date published

2012-11-14

Updated at

2024-03-05 08:30:19 +0900