Compositional changes between metastable SnO and stable SnO2 in a sputtered film for p-type thin-film transistors

Article

Creator

Yong-Lie Sun ; Toshihide Nabatame ; Jong Won Chung ; Tomomi Sawada ; Hiromi Miura ; Manami Miyamoto ; Kazuhito Tsukagoshi

Keyword

p-type SnO, Thin-film transistors, Sputtering, High vacuum Annealing

Date published

2024-10-09

Updated at

2024-10-15 16:30:30 +0900