Composition determination of beta-(AlxGa1-x)2O3 layers coherently grown on (010) beta-Ga2O3 substrates by high-resolution x-ray diffraction

Article

Creator

Yuichi Oshima ; Elaheh Ahmadi ; Stefan C. Badescu ; Feng Wu ; James S. Speck

Keyword

β-Ga2O3, composition, atom probe

Date published

2016-06-01

Updated at

2024-01-24 09:26:50 +0900