Fabrication of β-Ga ₂ O ₃ /air-gap structures on (001) β-Ga ₂ O ₃ using HCl gas etching

Article

Creator

Takayoshi Oshima ; Yuichi Oshima

Keyword

β-Ga2O3, cantilever, air bridge, MEMS

Date published

2025-12-31

Updated at

2025-09-04 12:30:25 +0900