2 records found. Displaying records 1 to 2.
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
- Journal article
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)
;
TANUMA, Shigeo (author) (Search by this author)
- Keyword
- argon ion sputtering, InP/GaInAsP multilayer specimens, Auger depth profiling analysis
- Date published
- 2011-06-10
- Updated at
- 2022-10-03 02:01:29 +0900
Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
- Journal article
- Creator
-
Ogiwara, Toshiya (author) (Search by this author)
;
Tanuma, Shigeo (author) (Search by this author)
- Keyword
- argon ion sputtering, compound semiconductor, surface observation using a scanning electron microscope
- Date published
- 1995-03-08
- Updated at
- 2022-10-03 01:31:38 +0900