2 records found.
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
- Article
- Creator
-
OGIWARA, Toshiya
;
TANUMA, Shigeo
- Keyword
- argon ion sputtering, InP/GaInAsP multilayer specimens, Auger depth profiling analysis
- Date published
- 2011-06-10
- Updated at
- 2022-10-03 02:01:29 +0900
Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
- Article
- Creator
-
Ogiwara, Toshiya
;
Tanuma, Shigeo
- Keyword
- argon ion sputtering, compound semiconductor, surface observation using a scanning electron microscope
- Date published
- 1995-03-08
- Updated at
- 2022-10-03 01:31:38 +0900