Keyword: TMAH
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3 records found.

article.pdf
Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles
Article
Creator
Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, TMAH
Date published
2026-02-01
Updated at
2026-02-25 12:30:03 +0900
Oshima_2025_Appl._Phys._Express_18_116501-1.pdf
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
Article
Creator
Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, TMAH, wet etching, MEMS
Date published
2025-11-01
Updated at
2025-11-27 08:30:13 +0900
jjap_64_8_088001.pdf
Step-and-terrace surface formation on (001) β-Ga2O3 by wet etching using 2.38 wt% tetramethylammonium hydroxide (TMAH) lithographic developer
Article
Creator
Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, TMAH, Wet etching
Date published
2025-08-01
Updated at
2025-08-18 16:30:36 +0900