A data-driven surrogate model for X-ray photoelectron spectroscopy based on survey spectrum background features

Journal article

Creator

Shunichi Yoneda (author) (Search by this author)

Shunichi Yoneda ;

Ryo Murakami (author) (Search by this author)

https://orcid.org/0000-0001-8585-9268

National Institute for Materials Science

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Ryo Murakami ;

Hiroshi Shinotsuka (author) (Search by this author)

https://orcid.org/0000-0001-5147-1396

National Institute for Materials Science

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Hiroshi Shinotsuka ;

Hideki Yoshikawa (author) (Search by this author)

https://orcid.org/0000-0002-7389-8865

National Institute for Materials Science

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Hideki Yoshikawa ;

Shigeo Tanuma (author) (Search by this author)

https://orcid.org/0000-0003-2628-9941

National Institute for Materials Science

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Shigeo Tanuma ;

Hiromi Tanaka (author) (Search by this author)

Hiromi Tanaka ;

Hayaru Shouno (author) (Search by this author)

Hayaru Shouno ;

Kenji Nagata (author) (Search by this author)

https://orcid.org/0000-0001-9894-4461

National Institute for Materials Science

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Kenji Nagata

Keyword

X-ray photoelectron spectroscopy, Survey spectrum, Surrogate model, Total electron attenuation length, Thickness estimation

Date published

2026-03-31

Updated at

2026-04-16 15:42:06 +0900