Keyword: SPring-8 BL15
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Dataset
XPS spectral data for p- and n-type Si wafers with various resistivities acquired at SPring-8 BL15
Dataset
Creator
SUMIYA, Masatomo SAMURAI ORCID
Keyword
XPS, SPring-8 BL15, Si
Date published
Updated at
2024-05-24 08:30:24 +0900