10 records found.
Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-01-05 22:13:20 +0900
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
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OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-04-07 22:57:41 +0900
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
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OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-01-05 22:12:41 +0900
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-10-08 12:20:27 +0900
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-03-30 18:50:38 +0900
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-03-30 18:50:25 +0900
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-01-05 22:12:25 +0900
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-01-05 22:11:29 +0900
English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
- Journal article
- Creator
-
Ogiwara, Toshiya (author) (Search by this author)
;
Nagata, Takahiro (author) (Search by this author)
;
Yoshikawa, Hideki (author) (Search by this author)
- Keyword
- Auger Depth Profiling Analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
- Date published
- 2020-06-04
- Updated at
- 2022-10-03 01:48:14 +0900
Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
- Journal article
- Creator
-
Yoshikawa, Hideki (author) (Search by this author)
;
Ogiwara, Toshiya (author) (Search by this author)
;
Nagata, Takahiro (author) (Search by this author)
- Keyword
- Auger Depth Profiling analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
- Date published
- 2019-03-07
- Updated at
- 2024-01-05 22:11:28 +0900