Probing of Polarization Reversal in Ferroelectric (Al,Sc)N Films Using Single‐ and Tri‐Layered Structures With Different Sc/(Al+Sc) Ratio

Article

Creator

Shinnosuke Yasuoka ; Takao Shimizu ; Kazuki Okamoto ; Nana Sun ; Soshun Doko ; Naoko Matsui ; Toshikazu Irisawa ; Koji Tsunekawa ; Alexei Gruverman ; Hiroshi Funakubo

Keyword

Ferroelectric, (Al,Sc)N Films, Wurtzite

Date published

2024-10-13

Updated at

2025-12-18 16:26:41 +0900