20.1 A 3.5×3.5mm² 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack

Journal article

Creator

Kotaro Naruse (author) (Search by this author)

Kotaro Naruse ;

Naru Kato (author) (Search by this author)

Naru Kato ;

Takuma Matsumori (author) (Search by this author)

Takuma Matsumori ;

Jun Shlomi (author) (Search by this author)

Jun Shlomi ;

Yoshihiro Midoh (author) (Search by this author)

Yoshihiro Midoh ;

Tetsuya Hirose (author) (Search by this author)

Tetsuya Hirose ;

Gaku Imamura (author) (Search by this author)

https://orcid.org/0000-0002-3130-7190

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Gaku Imamura ;

Genki Yoshikawa (author) (Search by this author)

https://orcid.org/0000-0002-9136-8964

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Genki Yoshikawa ;

Constantine Sideris (author) (Search by this author)

Constantine Sideris ;

Noriyuki Miura (author) (Search by this author)

Noriyuki Miura

Keyword

gas sensor, CMOS, MEMS

Date published

2025-02-16

Updated at

2025-12-25 16:21:05 +0900