Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam

Article

Creator

Yoshikawa, Hideki ; Ogiwara, Toshiya ; Nagata, Takahiro

Keyword

Auger Depth Profiling analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam

Date published

2019-03-07

Updated at

2024-01-05 22:11:28 +0900