Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs

Proceedings

Creator

Ryo Tanaka ; Shinya Takashima ; Katsunori Ueno ; Masahiro Horita ; Jun Suda ; Jun Uzuhashi ; Tadakatsu Ohkubo ; Masaharu Edo

Keyword

gallium nitride, atom probe tomography, transmission electron microscopy

Date published

2023-06-08

Updated at

2024-04-19 12:30:23 +0900