Plasma treatment of MoS₂ field-effect transistors using solid-state fluorine source

Journal article

Creator

Hiroki Kii (author) (Search by this author)

Hiroki Kii ;

Naoka Nagamura (author) (Search by this author)

https://orcid.org/0000-0002-7697-8983

NIMS Researchers Directory SAMURAI

Naoka Nagamura ;

Ryo Nouchi (author) (Search by this author)

https://orcid.org/0000-0002-7232-4827 (unauthenticated)

Ryo Nouchi

Keyword

transition-metal dichalcogenide, surface passivation, hysteresis, water repellency, substitutional doping

Date published

2025-06-30

Updated at

2026-01-20 09:55:23 +0900