Plasma treatment of MoS₂ field-effect transistors using solid-state fluorine source

Article

Creator

Hiroki Kii ; Naoka Nagamura ; Ryo Nouchi

Keyword

transition-metal dichalcogenide, surface passivation, hysteresis, water repellency, substitutional doping

Date published

2025-06-30

Updated at

2026-01-20 09:55:23 +0900