Vacancy-Type Defects and Oxygen Incorporation in NiAl for Advanced Interconnects Probed by Monoenergetic Positron Beams and Atom Probe Tomography

Article

Creator

Akira Uedono ; Claudia Fleischmann ; Jean-Philippe Soulié ; Mustafa Ayyad ; Jeroen E. Scheerder ; Christoph Adelmann ; Jun Uzuhashi ; Tadakatsu Ohkubo ; Koji Michishio ; Nagayasu Oshima ; Shoji Ishibashi

Keyword

atom probe tomography, positron annihilation

Date published

2024-07-10

Updated at

2025-07-10 08:30:19 +0900