<i>In-plane</i> lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO₃(111) substrates via reactive magnetron sputtering

Journal article

Creator

Kota Hasegawa (author) (Search by this author)

Kota Hasegawa ;

Takao Shimizu (author) (Search by this author)

https://orcid.org/0000-0001-9508-7601

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takao Shimizu ;

Naoki Ohashi (author) (Search by this author)

https://orcid.org/0000-0002-4011-0031

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Naoki Ohashi

Keyword

(Al,Sc)N, Epitaxial films, magnetron sputtering, strontium titanate, lattice mismatch, lattice orientation, Scandium Aluminate

Date published

2023-07-01

Updated at

2025-04-14 16:30:51 +0900