Electrical Properties of Boron-Doped Diamond MOSFETs With Ozone as Oxygen Precursor for Al2O3 Deposition

Article

Creator

Jiangwei Liu ; Tokuyuki Teraji ; Bo Da ; Yasuo Koide

Keyword

Boron-doped diamond, MOS capacitor, MOSFET

Date published

2023-03-16

Updated at

2024-01-05 22:13:56 +0900