Resource type: journal_article Keyword: HfO2/Si
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Vol.25_No.3_2019.pdf
English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
Article
Creator
Ogiwara, Toshiya SAMURAI ORCID ; Nagata, Takahiro SAMURAI ORCID ; Yoshikawa, Hideki SAMURAI ORCID
Keyword
Auger Depth Profiling Analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
Date published
2020-06-04
Updated at
2022-10-03 01:48:14 +0900
Vol.24_No.3_03_Ogiwara.pdf
Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
Article
Creator
Yoshikawa, Hideki SAMURAI ORCID ; Ogiwara, Toshiya SAMURAI ORCID ; Nagata, Takahiro SAMURAI ORCID
Keyword
Auger Depth Profiling analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
Date published
2019-03-07
Updated at
2024-01-05 22:11:28 +0900