Auger Depth Profiling Analysis of FeNi/CoFeB/FeNi Specimen Using an Ultra Low Angle Incidence Ion Beam

Journal article

Creator

Ogiwara, Toshiya (author) (Search by this author)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

Ogiwara, Toshiya ;

Yanagiuchi, Katsuaki (author) (Search by this author)

https://orcid.org/0000-0002-3882-8052 (unauthenticated)

Yanagiuchi, Katsuaki ;

Yoshikawa, Hideki (author) (Search by this author)

https://orcid.org/0000-0002-7389-8865

NIMS Researchers Directory SAMURAI

Yoshikawa, Hideki

Keyword

Ultra Low Angle Incidence Ion Beam, FeNi/CoFeB/FeNi Thin Film, Auger Depth Profiling Analysis

Date published

2019-03-31

Updated at

2024-01-05 22:13:23 +0900