Simulation-Based Investigation of Curtain Gas Effect on Metal-Organic Chemical Vapor Deposition Growth of Two-Dimensional Transition Metal Dichalcogenides

Article

Creator

Feng Zhang ; Fanyu Zeng ; Daichi Kozawa ; Ryo Kitaura

Keyword

2D materials, Finite Element Method, Chemical Vapor Deposition

Date published

2024-07-17

Updated at

2025-07-08 08:30:18 +0900