Keyword: Si

3 records found.

[Vol. 68]New GaN MEMS Resonator Is Temperature-Stable up to 600 K_ WPI-MANA.pdf
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
Magazine
Collection
Research Highlights
Creator
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (Search by this author)
National Institute for Materials Science
Keyword
GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
Date published
2021-07-13
Updated at
2023-12-26 21:38:08 +0900

[Vol. 28]Opening the Way to Mobile Olfaction with Nanomechanical Sensors _ WPI-MANA.pdf
[Research Highlights Vol.28] Opening the Way to Mobile Olfaction with Nanomechanical Sensors
Magazine
Collection
Research Highlights
Creator
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (Search by this author)
National Institute for Materials Science
Keyword
Olfactory sensor, Membrane-type Surface stress Sensor (MSS), Nanomechanical sensor, Artificial Olfaction, Industry-government-academia joint research framework, Si, Polymer, Nanoparticle
Date published
2016-12-02
Updated at
2023-12-25 00:30:19 +0900

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First-principles lattice thermal conductivity calculation for Si / Fd-3m (227) / materials id 149
Dataset
Collection
MDR lattice thermal conductivity calculation database
Creator
Atsushi Togo (author) (Search by this author)
Center for Basic Research on Materials, National Institute for Materials Science
ORCID SAMURAI
Keyword
Lattice thermal conductivity, Si
Date published
Updated at
2026-01-24 13:32:21 +0900