Epitaxial lateral overgrowth of α-Ga2O3 by halide vapor phase epitaxy

Journal article

Creator

Y. Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

NIMS Researchers Directory SAMURAI

Y. Oshima ;

K. Kawara (author) (Search by this author)

K. Kawara ;

T. Shinohe (author) (Search by this author)

T. Shinohe ;

T. Hitora (author) (Search by this author)

T. Hitora ;

M. Kasu (author) (Search by this author)

M. Kasu ;

S. Fujita (author) (Search by this author)

S. Fujita

Keyword

α-Ga2O3, HVPE, ELO, dislocation

Date published

2019-02-01

Updated at

2024-01-29 16:48:15 +0900