Epitaxial Lateral Overgrowth of c-plane α-Ga2O3 using a stripe mask with ultra-narrow windows

Journal article

Creator

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Takashi Shinohe (author) (Search by this author)

FLOSFIA INC.

Takashi Shinohe

Keyword

Ga2O3, dislocation, HVPE, ELO

Date published

2025-05-19

Updated at

2025-05-21 16:30:09 +0900