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English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
- Journal article
- Creator
-
Ogiwara, Toshiya (author) (Search by this author)
;
Nagata, Takahiro (author) (Search by this author)
;
Yoshikawa, Hideki (author) (Search by this author)
- Keyword
- Auger Depth Profiling Analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
- Date published
- 2020-06-04
- Updated at
- 2022-10-03 01:48:14 +0900