Strain Control of (001)-Polar-Axis-Oriented Epitaxial Y-Doped HfO₂ Thin Films

Journal article

Creator

Yoshiki Maekawa (author) (Search by this author)

Yoshiki Maekawa ;

Koji Hirai (author) (Search by this author)

Koji Hirai ;

Kazuki Okamoto (author) (Search by this author)

Kazuki Okamoto ;

Takao Shimizu (author) (Search by this author)

https://orcid.org/0000-0001-9508-7601

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takao Shimizu ;

Hiroshi Funakubo (author) (Search by this author)

Hiroshi Funakubo

Keyword

Ferroelectric HfO2-based film, Epitaxial film, {100} Orientation control, Polar axis orientation, Pulse laser deposition

Date published

2024-07-25

Updated at

2024-12-24 13:58:35 +0900