Keyword: atomic layer deposition

2 records found.

ALD_Interlayers_for_robust_metal-polymer_interfaces_supporting-info.pdf
Atomic Layer-Deposited Interlayers for Robust Metal–Polymer Interfaces
Journal article
Creator
Johanna Byloff (author) (Search by this author)
ORCID ;
Claus Othmar Wolfgang Trost (author) (Search by this author)
ORCID ;
Vivek Devulapalli (author) (Search by this author)
;
Shuhel Altaf Husain (author) (Search by this author)
;
Damien Faurie (author) (Search by this author)
ORCID ;
Pierre-Olivier Renault (author) (Search by this author)
; ORCID SAMURAI ;
Megan J. Cordill (author) (Search by this author)
ORCID ;
Daniele Casari (author) (Search by this author)
ORCID ;
Barbara Putz (author) (Search by this author)
Keyword
thin films, electromechanical properties, atomic layer deposition, flexible substrates, tensile testing, adhesion
Date published
2025-07-16
Updated at
2025-08-22 09:46:25 +0900

ChemMater36_6139_2024.pdf
Effects of Plasma Reactants on Atomic Layer Deposition of Lithium Phosphate and Lithium Phosphorus Oxynitride Electrolyte Films
Journal article
Creator
Tohru Tsuruoka (author) (Search by this author)
ORCID SAMURAI ;
Samapika Mallik (author) (Search by this author)
ORCID ;
Takuji Tsujita (author) (Search by this author)
;
Yuu Inatomi (author) (Search by this author)
;
Kazuya Terabe (author) (Search by this author)
ORCID SAMURAI
Keyword
atomic layer deposition, lithium phosphate, lithium phosphorus oxynitride, solid-state electrolyte, plasma reactant
Date published
2024-06-25
Updated at
2025-06-25 08:30:22 +0900