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Journal article(2)
Keyword
atomic layer deposition (2)
adhesion (1)
electromechanical properties (1)
flexible substrates (1)
lithium phosphate (1)
lithium phosphorus oxynitride (1)
plasma reactant (1)
solid-state electrolyte (1)
tensile testing (1)
thin films (1)
(more)
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In Copyright (2)
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Keyword: atomic layer deposition
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2 records found.
Atomic Layer-Deposited Interlayers for Robust Metal–Polymer Interfaces
Journal article
Creator
Johanna Byloff
(author) (
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https://orcid.org/0000-0001-6026-6845
(unauthenticated)
Johanna Byloff
;
Claus Othmar Wolfgang Trost
(author) (
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)
https://orcid.org/0000-0002-7570-688X
(unauthenticated)
Claus Othmar Wolfgang Trost
;
Vivek Devulapalli
(author) (
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)
Vivek Devulapalli
;
Shuhel Altaf Husain
(author) (
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)
Shuhel Altaf Husain
;
Damien Faurie
(author) (
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https://orcid.org/0000-0001-7259-3958
(unauthenticated)
Damien Faurie
;
Pierre-Olivier Renault
(author) (
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)
Pierre-Olivier Renault
;
Thomas Edward James Edwards
(author) (
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)
https://orcid.org/0000-0002-3089-0062
NIMS Researchers Directory SAMURAI
Thomas Edward James Edwards
;
Megan J. Cordill
(author) (
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)
https://orcid.org/0000-0003-1142-8312
(unauthenticated)
Megan J. Cordill
;
Daniele Casari
(author) (
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)
https://orcid.org/0000-0003-2113-5070
(unauthenticated)
Daniele Casari
;
Barbara Putz
(author) (
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)
Barbara Putz
Keyword
thin films
,
electromechanical properties
,
atomic layer deposition
,
flexible substrates
,
tensile testing
,
adhesion
Date published
2025-07-16
Updated at
2025-08-22 09:46:25 +0900
Effects of Plasma Reactants on Atomic Layer Deposition of Lithium Phosphate and Lithium Phosphorus Oxynitride Electrolyte Films
Journal article
Creator
Tohru Tsuruoka
(author) (
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)
https://orcid.org/0000-0002-4322-4309
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Tohru Tsuruoka
;
Samapika Mallik
(author) (
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)
https://orcid.org/0000-0001-9281-9416
(unauthenticated)
Samapika Mallik
;
Takuji Tsujita
(author) (
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)
Takuji Tsujita
;
Yuu Inatomi
(author) (
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)
Yuu Inatomi
;
Kazuya Terabe
(author) (
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)
https://orcid.org/0000-0003-3988-3456
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Kazuya Terabe
Keyword
atomic layer deposition
,
lithium phosphate
,
lithium phosphorus oxynitride
,
solid-state electrolyte
,
plasma reactant
Date published
2024-06-25
Updated at
2025-06-25 08:30:22 +0900
Keyword
atomic layer deposition
(2)
adhesion
(1)
electromechanical properties
(1)
flexible substrates
(1)
lithium phosphate
(1)
lithium phosphorus oxynitride
(1)
plasma reactant
(1)
solid-state electrolyte
(1)
tensile testing
(1)
thin films
(1)
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