Atomic Layer Deposition of Polycrystalline Tin Dioxide Thin Films Using Liquid Bis（ethylcyclopentadienyl）tin

Journal article

Creator

Fumikazu MIZUTANI (author) (Search by this author)

Fumikazu MIZUTANI ;

Nobutaka TAKAHASHI (author) (Search by this author)

Nobutaka TAKAHASHI ;

Toshihide NABATAME (author) (Search by this author)

https://orcid.org/0000-0002-5973-0230

NIMS Researchers Directory SAMURAI

Toshihide NABATAME

Keyword

Atomic layer deposition, PEALD, Poricrystaline SnO2

Date published

2025-12-01

Updated at

2026-04-30 12:01:11 +0900