Halide vapor phase epitaxy of a thick c -plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template

Journal article

Creator

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Takayoshi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI

Takayoshi Oshima ;

Shiyu Xiao (author) (Search by this author)

https://orcid.org/0009-0007-0382-0396 (unauthenticated)

Shiyu Xiao ;

Kazuto Murakami (author) (Search by this author)

Kazuto Murakami ;

Katsuhiro Imai (author) (Search by this author)

Katsuhiro Imai ;

Takahiro Tomita (author) (Search by this author)

Takahiro Tomita

Keyword

Ga2O3, HVPE, Cr2O3

Date published

2026-02-21

Updated at

2026-02-18 16:30:15 +0900