2 records found.
Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
- Journal article
- Creator
-
Yoshikawa, Hideki (author) (Search by this author)
;
Ogiwara, Toshiya (author) (Search by this author)
;
Nagata, Takahiro (author) (Search by this author)
- Keyword
- Auger Depth Profiling analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
- Date published
- 2019-03-07
- Updated at
- 2024-01-05 22:11:28 +0900
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- Dataset
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)National Institute for Materials Science
;
NAGATA, Takahiro (author) (Search by this author)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (Search by this author)National Institute for Materials Science
- Keyword
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- Date published
- 2019-03-07
- Updated at
- 2024-10-08 12:20:27 +0900