High Doping Activation (≥1020 cm−3) in Tensile-Strained n‑Ge Alloys Achieved by High-Speed Continuous-Wave Laser Annealing

論文

著者

Rahmat Hadi Saputro ; Tatsuro Maeda ; Kaoru Toko ; Ryo Matsumura ; Naoki Fukata

キーワード

germanium, thin film, polycrystalline growth, laser annealing, impurity doping

刊行年月日

2024-06-25

更新時刻

2025-06-03 08:30:17 +0900