Effect of sequential N ion implantation in the formation of a shallow Mg-implanted p-type GaN layer

論文

著者

Jun Uzuhashi ; Jun Chen ; Ryo Tanaka ; Shinya Takashima ; Masaharu Edo ; Tadakatsu Ohkubo ; Takashi Sekiguchi

キーワード

gallium nitride, atom probe tomography, transmission electron microscopy, cathodoluminescence

刊行年月日

2024-08-07

更新時刻

2024-08-03 08:30:15 +0900