Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced interconnects

論文

著者

Takayuki Harada ; Zuin Ping Lily Ang ; Yuki Sakakibara ; Takuro Nagai ; Yasushi Masahiro

キーワード

Interconnect, Thin films, Conductive material, Low dimensional materials, Electronic materials

刊行年月日

2025-06-02

更新時刻

2025-06-10 08:30:11 +0900