Epitaxial Lateral Overgrowth of c-plane α-Ga2O3 using a stripe mask with ultra-narrow windows

ジャーナル論文

著者

Yuichi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Takashi Shinohe (author) (この著者で検索)

FLOSFIA INC.

Takashi Shinohe

キーワード

Ga2O3, dislocation, HVPE, ELO

刊行年月日

2025-05-19

更新時刻

2025-05-21 16:30:09 +0900