An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused Ion Beam/Scanning Electron Microscopy

ジャーナル論文

著者

Jun Uzuhashi (author) (この著者で検索)

https://orcid.org/0000-0003-2023-8158

NIMS Researchers Directory SAMURAI

Jun Uzuhashi ;

Tadakatsu Ohkubo (author) (この著者で検索)

https://orcid.org/0000-0003-3548-1951

NIMS Researchers Directory SAMURAI

Tadakatsu Ohkubo ;

Kazuhiro Hono (author) (この著者で検索)

https://orcid.org/0000-0001-7367-0193

NIMS Researchers Directory SAMURAI

Kazuhiro Hono

キーワード

atom probe tomography, focused ion beam, scanning electron microscopy

刊行年月日

2025-02-03

更新時刻

2024-09-05 08:30:18 +0900