License: In Copyright Keyword: Solid state debonding
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JAFOE.pdf
Surface Modification for High Reliability and Reversible Hybrid Interconnection
Poster
Creator
Akitsu Shigetou SAMURAI ORCID
Keyword
Hybrid bonding, Cu, Solid state debonding
Date published
Updated at
2026-01-21 09:20:22 +0900