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Estimation of valence state and growth rate using principal component analysis of plasma emission in reactive sputtering deposition
ジャーナル論文
著者
Rintaro Minami
(author) (
この著者で検索
)
University of Tsukuba a Department of Applied Physics
Rintaro Minami
;
Eiji Kita
(author) (
この著者で検索
)
Eiji Kita
;
Chiharu Mitsumata
(author) (
この著者で検索
)
Chiharu Mitsumata
;
Hideto Yanagihara
(author) (
この著者で検索
)
Hideto Yanagihara
キーワード
Machine learning
,
principal component analysis (PCA)
,
reactive magnetron sputtering
,
plasma emission spectrum
,
Mössbauer spectroscopy
刊行年月日
2025-12-31
更新時刻
2025-09-10 16:30:38 +0900
Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:13:20 +0900
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-04-07 22:57:41 +0900
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:12:41 +0900
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-10-08 12:20:27 +0900
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-03-30 18:50:38 +0900
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-03-30 18:50:25 +0900
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:12:25 +0900
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7376-6571
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
OGIWARA, Toshiya
;
NAGATA, Takahiro
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8591-2943
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7389-8865
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:11:29 +0900
Motion of Two-Dimensional Excitons in Momentum Space Leads to Pseudospin Distribution Narrowing on the Bloch Sphere
ジャーナル論文
著者
Garima Gupta
(author) (
この著者で検索
)
Garima Gupta
;
Kenji Watanabe
(author) (
この著者で検索
)
https://orcid.org/0000-0003-3701-8119
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Kenji Watanabe
;
Takashi Taniguchi
(author) (
この著者で検索
)
https://orcid.org/0000-0002-1467-3105
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takashi Taniguchi
;
Kausik Majumdar
(author) (
この著者で検索
)
Kausik Majumdar
キーワード
2D materials
,
Exciton Pseudospin
,
Valley Decoherence
,
Motional Narrowing
,
Polarization Contrast
,
MoS2
刊行年月日
2024-05-08
更新時刻
2025-07-29 12:30:27 +0900
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