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Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- データセット
- 著者
-
OGIWARA, Toshiya (author) (この著者で検索)National Institute for Materials Science
;
NAGATA, Takahiro (author) (この著者で検索)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- 刊行年月日
- 2019-03-07
- 更新時刻
- 2024-01-05 22:12:25 +0900
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
- データセット
- 著者
-
OGIWARA, Toshiya (author) (この著者で検索)National Institute for Materials Science
;
NAGATA, Takahiro (author) (この著者で検索)National Institute for Materials Science
;
YOSHIKAWA, Hideki (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
- 刊行年月日
- 2019-03-07
- 更新時刻
- 2024-01-05 22:11:29 +0900