File type: application/zip Measurement method: x-ray photoelectron spectroscopy
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Dataset
XPS spectral data for p- and n-type Si wafers with various resistivities acquired at SPring-8 BL15
Dataset
Creator
SUMIYA, Masatomo (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI
Keyword
XPS, SPring-8 BL15, Si
Date published
Updated at
2024-05-24 08:30:24 +0900
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