Thermal Conductivity and Thermal Boundary Resistance of Low–Dielectric Constant Interlayer Dielectrics in Advanced Very Large Scale Integration Interconnects
- ジャーナル論文
- 著者
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;Tianzhuo Zhan (author) (この著者で検索);Chong Zheng (author) (この著者で検索);Mao Xu (author) (この著者で検索);Zhi Cao (author) (この著者で検索)Yen-Ju Wu (author) (この著者で検索)National Institute for Materials Science
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Yibin Xu (author) (この著者で検索)National Institute for Materials Science
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;Ryo Yokogawa (author) (この著者で検索);Atsushi Ogura (author) (この著者で検索)Yanming Xue (author) (この著者で検索)
https://orcid.org/0000-0003-1061-229X
(unauthenticated)
National Institute for Materials Science
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;Haidong Wang (author) (この著者で検索);Mengjie Song (author) (この著者で検索);Wei Wang (author) (この著者で検索);Bo Chen (author) (この著者で検索);Takanobu Watanabe (author) (この著者で検索);Yonggang Jiang (author) (この著者で検索);Huawei Chen (author) (この著者で検索)Deyuan Zhang (author) (この著者で検索) - キーワード
- thermal conductivity, thermal boundary resistance, low-k dielectrics, VLSI interconnects, persistent homology
- 刊行年月日
- 2025-09-23
- 更新時刻
- 2026-04-30 12:01:11 +0900
Interpretable evaluation of STEM images of nanostructures via homology analysis
- 会議発表ポスター
- 著者
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Eguchi Ryuto (author) (この著者で検索)National Institute for Materials Science Research Center for Energy and Environmental Materials (GREEN)/Battery and Cell Materials Field/Environment-Controlled Microscopy Group
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;Yu Wen (author) (この著者で検索)National Institute for Materials Science Research Center for Advanced Measurement and Characterization/Atomic Structure and Physics Field/In-situ Characterization Technique Development GroupAyako Hashimoto (author) (この著者で検索)National Institute for Materials Science Research Center for Energy and Environmental Materials (GREEN)/Battery and Cell Materials Field/Environment-Controlled Microscopy Group - キーワード
- persistent homology
- 刊行年月日
- 更新時刻
- 2024-12-03 16:31:06 +0900