Low-Energy Dissipation Diamond MEMS

ジャーナル論文

著者

Guo Chen (author) (この著者で検索)

Guo Chen ;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Satoshi Koizumi ;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yasuo Koide ;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Meiyong Liao

キーワード

Diamond, MEMS

刊行年月日

2024-09-27

更新時刻

2025-07-29 08:30:21 +0900