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Zhang_MEMS2025_202415-submit.docx
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
Conference paper
Creator
Zilong Zhang (author) (Search by this author)
;
Zhijian Zhao (author) (Search by this author)
; ORCID SAMURAI ;
Takahito Ono (author) (Search by this author)
;
Masaya Toda (author) (Search by this author)
Keyword
Diamond, MEMS, magnetic sensors
Date published
2025-01-19
Updated at
2025-11-13 16:30:04 +0900
Revised chapter-20230509 -new.docx
Single-Crystal Diamond MEMS Magnetic Sensor
Book
Creator
Zilong Zhang (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID ;
Meiyong Liao (author) (Search by this author)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS, magnetic sensors
Date published
2024-05-22
Updated at
2024-10-21 12:30:45 +0900