Low-Energy Dissipation Diamond MEMS

Journal article

Creator

Guo Chen (author) (Search by this author)

Guo Chen ;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Satoshi Koizumi ;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yasuo Koide ;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Meiyong Liao

Keyword

Diamond, MEMS

Date published

2024-09-27

Updated at

2025-07-29 08:30:21 +0900