Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway

論文

著者

Yuhao Shi ; Masatake Tsuji ; Hanjun Cho ; Shigenori Ueda ; Junghwan Kim ; Hideo Hosono

キーワード

oxide semiconductors, IGZO, thin-film transistors, contact resistance, palladium, hydrogen

刊行年月日

2024-04-02

更新時刻

2024-04-08 16:30:22 +0900