Oxygen reduction for p-type TeOx thin-film transistor

ジャーナル論文

著者

Seiichi Kato (author) (この著者で検索)

https://orcid.org/0000-0002-6427-5463

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Seiichi Kato ;

Masayuki Okamura (author) (この著者で検索)

https://orcid.org/0009-0003-3636-6653 (unauthenticated)

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Masayuki Okamura ;

Tomomi Sawada (author) (この著者で検索)

https://orcid.org/0000-0002-2335-4480 (unauthenticated)

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Tomomi Sawada ;

Toshihide Nabatame (author) (この著者で検索)

https://orcid.org/0000-0002-5973-0230

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NIMS Researchers Directory SAMURAI

Toshihide Nabatame ;

Kazuhito Tsukagoshi (author) (この著者で検索)

https://orcid.org/0000-0001-9710-2692

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Kazuhito Tsukagoshi

キーワード

oxide transistor, p-type TFT, TeOx, BEOL compatible, reducing agent, tungsten

刊行年月日

2026-05-25

更新時刻

2026-06-09 17:58:56 +0900