Compositional changes between metastable SnO and stable SnO2 in a sputtered film for p-type thin-film transistors

論文

著者

Yong-Lie Sun ; Toshihide Nabatame ; Jong Won Chung ; Tomomi Sawada ; Hiromi Miura ; Manami Miyamoto ; Kazuhito Tsukagoshi

キーワード

p-type SnO, Thin-film transistors, Sputtering, High vacuum Annealing

刊行年月日

2024-10-09

更新時刻

2024-10-15 16:30:30 +0900