Step-and-terrace surface formation on (001) β-Ga₂O₃ by wet etching using 2.38 wt% tetramethylammonium hydroxide (TMAH) lithographic developer

論文

著者

Takayoshi Oshima

キーワード

Ga2O3, TMAH, Wet etching

刊行年月日

2025-08-01

更新時刻

2025-08-18 16:30:36 +0900