ファイル種別: application/pdf キーワード: Si

4 件のレコードが見つかりました。

[Vol. 68]New GaN MEMS Resonator Is Temperature-Stable up to 600 K_ WPI-MANA.pdf
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
雑誌
コレクション
Research Highlights
著者
International Center for Materials Nanoarchitectonics (WPI-MANA)
キーワード
GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
刊行年月日
2021-07-13
更新時刻
2023-12-26 21:38:08 +0900

[Vol. 55]A New On-chip Sensor for Infrared Spectrography_ WPI-MANA.pdf
[Research Highlights Vol.55] A New On-chip Sensor for Infrared Spectrography
雑誌
コレクション
Research Highlights
著者
International Center for Materials Nanoarchitectonics (WPI-MANA)
キーワード
multi-wavelength sensing, infrared sensing, high wavelength resolution, high-directivity, thermal radiation, perfect absorbers, pyroelectric sensors, Au, Si, Si3N4, ZnO
刊行年月日
2019-11-14
更新時刻
2023-12-25 00:30:24 +0900

[Vol. 28]Opening the Way to Mobile Olfaction with Nanomechanical Sensors _ WPI-MANA.pdf
[Research Highlights Vol.28] Opening the Way to Mobile Olfaction with Nanomechanical Sensors
雑誌
コレクション
Research Highlights
著者
International Center for Materials Nanoarchitectonics (WPI-MANA)
キーワード
Olfactory sensor, Membrane-type Surface stress Sensor (MSS), Nanomechanical sensor, Artificial Olfaction, Industry-government-academia joint research framework, Si, Polymer, Nanoparticle
刊行年月日
2016-12-02
更新時刻
2023-12-25 00:30:19 +0900

[Vol. 14]Nanomechanical sensors detect cancer from breath_ WPI-MANA.pdf
[Research Highlights Vol.14] Nanomechanical sensors detect cancer from breath
雑誌
コレクション
Research Highlights
著者
International Center for Materials Nanoarchitectonics (WPI-MANA)
キーワード
Olfactory sensor, Membrane-type Surface stress Sensor (MSS), Breath Analysis, Breath Diagnosis, Cancer Diagnosis, Nanomechanical sensor, Artificial Olfaction, Polymer, Si
刊行年月日
2014-04-23
更新時刻
2023-12-25 00:30:16 +0900